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The SEM is located in room B88.

MIRA3 is a high performance FEG-SEM system that features a high brightness Schottky emitter.

Features include:

  • Giant chamber with 5-axis fully motorised stage
  • Beam deceleration technology (BDT) for high resolution imaging and high surface sensitivity at very low kV
  • High resolution performance 1.0 nm at 30kV
  • Variable pressure operation
  • Fully integrated active anti-vibration system
  • Chamber plasma cleaner

 

Detectors include:

  • SE detector (Everhart-Thornley Type)
  • In-Beam SE detector
  • Low vacuum SE detector
  • In-Beam BSE detector
  • Retractable BSE detector
  • Retractable STEM detector

EDS acquisition and analysis can be performed on an Oxford Instruments Aztec Energy X-maxN 80 EDS system.

 

 

A Kammrath & Weiss transfer module is available for transferring air sensitive samples between glove box and SEM.

https://www.kammrath-weiss.com/en/products/materials/transfer-module.html

 

Booking

SEM time can be booked through the booking system .  Please note the system is read only, so please contact Dr Heather Greer (hfg24@cam.ac.uk) and/or Dr Chris Truscott (clt45@cam.ac.uk) to arrange access and training.

Internal usage charge is £40 per hour. Sample submission £50/h. Bookings cancelled with less than 24h notice will be charged at 50%.