The SEM is located in room B88.
MIRA3 is a high performance FEG-SEM system that features a high brightness Schottky emitter.
Features include:
- Giant chamber with 5-axis fully motorised stage
- Beam deceleration technology (BDT) for high resolution imaging and high surface sensitivity at very low kV
- High resolution performance 1.0 nm at 30kV
- Variable pressure operation
- Fully integrated active anti-vibration system
- Chamber plasma cleaner
Detectors include:
- SE detector (Everhart-Thornley Type)
- In-Beam SE detector
- Low vacuum SE detector
- In-Beam BSE detector
- Retractable BSE detector
- Retractable STEM detector
EDS acquisition and analysis can be performed on an Oxford Instruments X-maxN 80 EDS system.
A Kammrath & Weiss transfer module is available for transferring air sensitive samples between glove box and SEM.
https://www.kammrath-weiss.com/en/transfer-modules/
Coating options using our Quorum Technologies Q150T ES coater are Pt, Cr and C.
Booking
SEM time can be booked through the booking system . Please note the system is read only, so please contact Dr Heather Greer (hfg24@cam.ac.uk) to arrange access and training.
Usage charge is £40/h for independent use, £50/h for assisted/training and £60/h for submitted usage. Bookings cancelled with less than 24h notice will be charged at 50% and less than 2h of notice will be charged the full rate.
***Please make sure samples are dry before the SEM session***